Holmarc's probe station microscope is equipped with infinity corrected optical system for viewing and placement of the probe tips on the sample contacts. The highly corrected Long working distance apochromatic objective provide super quality images. The long working distance plan Apochromat objectives permit multiple layered samples to be viewed. HO-PSM series microscope incorporates quadruple revolving nosepiece (4-lens changeover turret) with objective mounting thread of M26 X 0.706 and parfocal distance of 95mm. High bright white LED with intensity adjustable option is provided for both Epi-scopic and angled illuminations.
Applications include failure analysis, LED, MEMS, optoelectronics, device characterization, wafer level reliability etc. We offer a complete set of accessories to allow you to position, navigate, and contact the wafer or device under test.
| 1. Probe Station with 4 micro-manipulators with probes having BNC output |
| 2. 4nos. of Micro-manipulators with X = 0 to 25 mm, Y = 0 to 25 mm and Z = 0 to 10 mm and +/- 3 degrees Tilt movements |
| 3. 10 Tungsten Probe tips with diameter 50 micron |
| 4. Sample holder with XYZ manipulatio |
| 5. Manipulator supporting stand and base plate with manual z axis stage for microscope |
| 6. Optical system with Infinity corrected Tube lens and at least 5X objective, trinocular viewing head and 10 X eye-piece |
| 7. 5MP, 12 bit color camera for imaging |
| 8. Normal Configuration Laptop with USB connectivity for remote operation of the camera |
| 9. 10 nos.of Gold coated pogo tips and 5 Nos. of probe tip (Diameter50 micron- Material Gold coated Tungsten) - 1 Set (Optional) |
| 10. 10X, Microscope Objective - 1 No. (Optional) |
| 11. 20X Microscope Objective - 1 No. (Optional) |
Specifications
| Manual micromanipulator : 4 Nos. |
| Axes : 4 (XYZ and Tilt) |
| X travel : 25 mm |
| Y travel : 25 mm |
| Z travel : 10 mm |
| Tilt : +/- 3 degree |
| Probe holding mechanism with BNC output |
| 1. Manipulator supporting stands, base plate, manualXYZ stage for microscope : 1 set |
| 2. XYZ Manual sample holder : 1 set |
| X travel : 25 mm |
| Y travel : 10 mm |
| Z travel : 10 mm |
| 3. Probe station binocular microscope and its support stand : 1 set |
| Optical system : Infinity corrected |
| Observation Method : bright field |
| Illumination : Reflected (Co-axial and Angled (or ring LED)) |
| Illumination system : High bright white LEDs |
| Nosepiece : revolving, quadruple with positive precision click stops |
| Viewing head : Siedentopf Trinocular head, 30 degree, 48-75mm IP adjustment |
| Eyepiece : 10X Wide field eyepiece, FN = 20mm, dioptre adjustable. |
| Focusing : Manual |
| Objectives : 1. LWD Plan Apo 5X (NA = 0.14, WD = 34mm, FOVeyepiece = 4mm, FOVcamera = 1.14mm x 0.856mm) |
| 2. LWD Plan Achro 2X (NA= 0.08, WD = 70mm, FOVeyepiece = 10mm, FOVcamera = 2.85mm x 2.14mm) |
| Camera |
| Optical format : 1/2.5” CMOS |
| Active imager size : 5.70mm x 4.28mm, 7.13mm diagonal |
| Active pixels : 2592 x 1944 (5Mp) |
| Pixel size : 2.2 x 2.2 um |
| Color filter array : RGB Bayer pattern |
| Shutter type : Electronic rolling shutter(ERS) |
| Frame rate : Full resolution -up to8fps, VGA -upto 70 fps |
| ADC resolution : 12- bit, on-chip |
| Pixel dynamic range : 70.1 dB |
| Operating temperature : -30°C to +70°C |
| Power consumption : 381mW at 15 fps full resolution |
| 4. Normal configuration laptop (since LCD is not available, normal configuration laptop will be provided) |
| 5. Image grabbing software |
| Optional Accessories |
| 1. LWD Plan Apo 10X microscope objective |
| NA : 0.3 |
| Working distance : 31mm |
| FOV eyepiece : 2mm |
| FOV camera : 0.57mm x 0.428 mm |
| 2. LWD Plan Apo 20X microscope objective |
| NA : 0.35 |
| Working distance : 29mm |
| FOV eyepiece : 2mm |
| FOV camera : 0.285mm x 0.214mm |
| 3. Probe tips : 5 Nos. |
| Tip diameter : 50 um |
| Material : Gold coated Tungsten |
| 4. Gold plated POGO tips |
| Qty = 10 Nos. |
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