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Probe Station System T01 EC

Model No: HO-PSM-T01-EC
    Manual micro manipulator :     2 Nos.
    Axes :     4 (XYZ and Tilt)
    X travel :     25 mm
    Y travel :     25 mm
    Z travel :     10 mm
    Tilt :     +/- 3 degree
    Probe tip holder with BNC output
    45-degree non-metal probe holder
    90-degree non-metal probe holder
    Magnetic base
    Material :     MS with black paint
    Output ports :     BNC connectors (4 Nos)
    N2 inlet and outlet port :     1 each
    Camera USB port :     1 No.
    Power socket and switch :     Door with hinges and lock
    Microscope illumination control knobs.
    Humidity sensor
    This cover will not be completely air tight. Minor leakage will be there.
    Customer needs to fill the enclosure with N2 to reduce the icing on substrate holder at below zero degree.
    1. LWD Plan Apo 10X microscope objective
    NA :     0.30
    Working distance :     31 mm
    FOV eyepiece :     2 mm
    FOV camera :     0.57 mm x 0.428 mm
    2. LWD Plan Apo 20X microscope objective
    NA :     0.35
    Working distance :     29 mm
    FOV eyepiece :     1 mm
    FOV camera :     0.285 mm x 0.214 mm
    3. LWD Plan Apo 50X microscope objective
    NA :     0.50
    Working distance :     17 mm
    FOV eyepiece :     0.4 mm
    FOV camera :     0.114 mm x 0.0856 mm
    4. Probe tips :     5 Nos
    Tip diameter :     50 um
    Material :     Tungsten
    5. Hot chuck :     1 No.
    Chuck diameter :     100 mm
    Temperature range :     RT - 200º C
    Temperature accuracy :     +/- 10º C
    Thermal sensor
    Temperature control software
Magnetic SS micromanipulator platen, supporting stands, base plate, manual XYZ stage for microscope : 1 set

    Platen :     Magnetic SS
    Platen supporting stand :     Height adjustable
    Base plate :     Black anodized aluminium
    Microscope XYZ stage
    XYZ travel :     100 mm x 100 mm x 100 mm
    Guide way :     Precision ball slide
    Drive :     Precision lead screw
    Lead screw :     1 mm pitch
    Lead screw type :     Ground
    Positioning accuracy :     10 um
    Construction :     Black anodized aluminium


XYZ Manual sample holder with Vacuum chuck and cooling chuck : 1 set

    Top plate diameter :     100 mm
    X axis :     25 mm travel
    Y axis :     10 mm travel
    Z axis :     10 mm travel
    XYZ resolution :     10 microns
    Cooling chuck and enclosure
    Temperature range :     RT to -20°C
    Temperature accuracy :     +/- 1°C
    Software controls


Probe station Trinocular microscope and its support stand : 1 set

    Optical system     Infinity corrected
    Observation Method     Bright field
    Illumination     Reflected (Co-axial and Angled)
    Illumination system     High bright white LEDs
    Nosepiece     Revolving, Quadruple with Positive precision click stops
    Viewing head     Siedentopf Trinocular head, 30 degree, 48 - 75 mm IP adjustment
    Eyepiece     10X Wide field eyepiece, FN = 20 mm, dioptre adjustable
    Focusing     Manual
Microscope Objective

    Long Working Distance Plan Apochromatic
    Magnification     5 X
    Numerical Aperture     0.14
    Working distance     40 mm
    FOV eyepiece     4 mm
    FOV camera     1.14 mm x 0.856 mm
Camera Specifications

    Optical format     1/2.5” CMOS
    Active imager size     5.70 mm x 4.28 mm, 7.13 mm diagonal
    Active pixels     2592 x 1944 (5Mp)
    Pixel size     2.2 x 2.2 um
    Color filter array     RGB Bayer pattern
    Shutter type     Electronic rolling shutter (ERS)
    Frame rate     Full resolution - up to 7fps, VGA - up to 26.7 fps
    ADC resolution     12 - bit, on-chip
    Pixel dynamic range     70.1 dB
    Operating temperature     -30ºC to +70ºC
    Sensitivity     1.76V / lux - sec (550nm)
    Power consumption     381 mW at 7 fps full resolution
    Interface     USB 2.0
    Image grabbing software


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