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Variable Angle Spectroscopic Ellipsometer

Model No: HO-SE-EW1

    Spectral range  =  375 nm - 1700 nm
    Ellipsometer type  =  Rotating analyser
    Incident angle  =  Adjustable from 50 - 75 degree, fully Automated (0.1 degree resolution)
    Thickness measurement range  =  10 nm - 10 micron
    Resolution of film thickness  =  0.01 nm
    Resolution of measured RI  =  0.001
    Sample XYZ stage  =  25 mm x 25 mm x 10 mm travel with tilting platform (Automated operation can be provided)
    Light source  =  100 W halogen lamp with adjustable power supply (control via software)
    Monochromator - source arm coupling  =  Fiber
    Monochromator :
    Optical layout   :  Czerny - Turner
    Focal length  :  200 mm
    Grating mount  :  Dual grating turret
    Number of gratings  :  2 (1200 l/mm holographic grating & 600l/mm precision ruled diffraction grating)
    Grating size  :  50 x 50 mm
    Aperture ratio  :  f / 3.5
    Number of entrance / exit ports  :  1
    Mechanical resolution drive  :  0.000072° / step
    Slit type  :  Micrometer
    Slit width  :  10 μm - 2 mm
    Slit height  :  12 mm
    Higher-order cut-off filter  :  Yes, Motorized (Selection can be controlled through PC)
    Higher-order filter size  :  12.5 mm
    Fiber optic coupler plate  :  Yes
    Linear dispersion  :  2.25 nm / mm
    Wavelength accuracy  :  ± 0.15 nm
    Resolution @ 25μm Slit width & 1200 l / mm Configuration  :  0.1 nm
    Input coupling optics  :  Yes, NA matched fused silica focusing lens
    Output coupling optics  :  Yes, NA matched fused silica collection lens for 10 x 10 mm area detector
    Computer interface  :  USB 2.0
    Trigger IN / OUT  :  Yes
    Software control  :  Windows - based software is used to control all spectrometer functions and detector readings
    Dual detector Auto selection control and measurement Module
    Detector 1  :  High-sensitive Si photodiode Detector
    Active Area  :  5.8 x 5.8 mm
    Peak Sensitivity wavelength  :  960 nm
    Dark Current ID VR = 10mV Max  :  5pA
    Detector 2  :  InGaAs Photodiode control and measurement Module
    Type  :  InGaAs Photodiode
    Responsivity @ 1310 nm (A/W)  :  0.8 minimum / 0.9 typical
    Responsivity @ 1550 nm (A/W)  :  0.9 minimum / 0.95 typical
    Active Area Diameter (mm)  :  3.0
    DAC  :  16 Bit
    Sampling rate  :  200 reading / second

Fig. Optical Layout of Variable Angle Spectroscopic Ellipsometer


    1. Constant Value Model
    2. Entered Value Model
    3. Cauchy’s Coefficients Model
    4. Sellmeier’s Coefficients Model
    5. Combination of Cauchy & Sellmier Model
    6. Drude Model
    7. Lorentz - Drude Model
    8. Brendel - Bormann Model
    9. Adachi Model
    10. Cauchy Lorentz Model
    11. Amorphous Dispersion Model
    12. Cauchy Absorption Model
    13. Sellmeier Lorentz Drude Model
    14. Cauchy Urbach Model
    Surface roughness Models : - (Effective Medium Theories)
    1. Lorentz - Lorentz
    2. Bruggeman EMA
    3. Linear EMA


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